Linear growth kinetics of nanometric silicides in Co/amorphous-Si and Co/CoSi/amorphous-Si thin films

Kinetics of silicide formation by thin films of V on Si and Si 0 2 substrates *

The reaction rate of vacuum-evaporated films of V of the order of I 000 A thick is investigated by MeV He backscattering spectrometry. On substrates of single-crystal Si and for anneal times up to several hours in the temperature range 570--650 ·c, VSi 2 is formed at a linear rate in time. The activation energy of the process is 1.7±0.2 eV. The presence of oxygen in amounts of 10% can significa...

Growth and Characterization of Ti-Si-N Thin Films

Growth, stability and decomposition of Mg 2 Si ultra-thin films on Si (100)

Using Auger Electron Spectroscopy (AES), Scanning Tunneling Microscopy/Spectroscopy (STM/STS) and Low Energy Electron Diffraction (LEED), we report an in-situ study of amorphous magnesium silicide (Mg2Si) ultra-thin films grown by thermally enhanced solid-phase reaction of few Mg monolayers deposited at room temperature (RT) on a Si(100) surface. Silicidation of magnesium films can be achieved ...

Multifunctional nanostructured Ti-Si-C thin films

In this Thesis, I have investigated multifunctional nanostructured Ti-Si-C thin films synthesized by magnetron sputtering in the substrate-temperature range from room temperature to 900 °C. The studies cover high-temperature growth of Ti3SiC2 and Ti4SiC3, low-temperature growth of Ti-Si-C nanocomposites, and Ti-Si-C-based multilayers, as well as their electrical, mechanical, and thermal-stabili...

In Situ Ordering of FePt Thin Films by Using Ag / Si and Ag / Mn 3 Si / Ag / Si Templates

In situ ordering of FePt thin films by sputtering onto Ag/Si and Ag/Mn3Si/Ag/Si templates has been demonstrated. Due to the evolution from island-like to a continuous film structure as a function of Ag thickness, the ordering and orientation of the FePt films both change with Ag thickness. A continuous (002) Ag film results in a greater L10 phase formation with -axis oriented both perpendicular...